Wurtzite-Type Ferroelectrics for Microelectronic Devices: Scalability and Integration to Silicon based Ferroelectric FETs

Autor:	Simon Fichtner, Georg Schönweger, Frank Dietz, Henning Hanssen, Heiko Züge, Tom-Niklas Kreutzer, Fabian Lofink, Hermann Kohlstedt, Holger Kapels, Michael Mensing
Rok vydání:	2023
Zdroj:	2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
DOI:	10.1109/edtm55494.2023.10103080
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::60296262d7b12470787e7f077cd810aa https://doi.org/10.1109/edtm55494.2023.10103080 Zobrazit plný text záznamu