Wafer defect detection method based on machine vision

Autor:	Dongyang Zhang, Yanjie Su, Chundong Zhao, Xiaoyan Chen, Jianyong Chen, Kuifeng Zhu
Rok vydání:	2020
Předmět:	Computer science Machine vision business.industry Wafer Computer vision General Medicine Artificial intelligence business
Zdroj:	Proceedings of International Conference on Artificial Life and Robotics. 25:795-799
ISSN:	2188-7829
DOI:	10.5954/icarob.2020.os15-2
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5fffd706be37b45f7d75424b8fa5c376 https://doi.org/10.5954/icarob.2020.os15-2 Zobrazit plný text záznamu