Enhancing 6 nm CD Patterned Defect Classification with TSOM and CNNs

Autor:	Ravikiran Attota, Armando Anaya
Rok vydání:	2023
Zdroj:	2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5fd450000f0fa0706a01e18a6528eb50 https://doi.org/10.1109/asmc57536.2023.10121112 Zobrazit plný text záznamu