Electrical characteristics and reliability of UV transparent Si/sub 3/n/sub 3/ metal-insulator-metal (MIM) capacitors
| Autor: | Vidhya Ramachandran, Kimball M. Watson, R.J. Bolam, Douglas D. Coolbaugh |
|---|---|
| Rok vydání: | 2003 |
| Předmět: |
Materials science
Dielectric reliability business.industry Electrical engineering Metal-insulator-metal Capacitance Electronic Optical and Magnetic Materials law.invention Capacitor Film capacitor Reliability (semiconductor) law Optoelectronics Electrical and Electronic Engineering Operating voltage business Scaling |
| Zdroj: | IEEE Transactions on Electron Devices. 50:941-944 |
| ISSN: | 0018-9383 |
| DOI: | 10.1109/ted.2003.812148 |
| Popis: | In this paper, we discuss the electrical characteristics and reliability of UV transparent Si/sub 3/N/sub 4/ metal-insulator-metal (MIM) capacitors. We examine film thicknesses in the range of 55 to 25 nm with capacitance densities from 1.2 ff//spl mu/m/sup 2/ to 2.8 ff//spl mu/m/sup 2/, respectively, for single MIM capacitors. A new approach for projecting the dielectric reliability of these films extends the limits of maximum operating voltage. Accounting for temperature acceleration and area scaling, the projected lifetimes can be met for a wide range of operating conditions. |
| Databáze: | OpenAIRE |
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