Time-dependent evolution of the structure and chemical bonds in diamond-like carbon films generated by the hot filament chemical vapour deposition method
| Autor: | G. Cocito, F. Caccavale, Maria Letizia Terranova, Vito Sessa, Marco Braglia, V. Rigato |
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| Rok vydání: | 1993 |
| Předmět: |
Diamond-like carbon
Chemistry Metals and Alloys Analytical chemistry Surfaces and Interfaces Chemical vapor deposition Rutherford backscattering spectrometry Surfaces Coatings and Films Electronic Optical and Magnetic Materials Amorphous solid symbols.namesake Carbon film Amorphous carbon Nuclear reaction analysis Materials Chemistry symbols Raman spectroscopy |
| Zdroj: | Thin Solid Films. 232:21-27 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/0040-6090(93)90756-f |
| Popis: | The chemical structure of inhomogeneous amorphous carbon films grown for different lengths of time in a hot filament chemical vapour deposition reactor from a methane-hydrogen mixture has been investigated by electron energy loss spectroscopy (EELS) and Raman spectroscopy. The changes in EELS and Raman spectral shapes allowed us to monitor the time-dependent structural evolution of the films, from an amorphous lattice with a noticeable fraction of sp3-bonded hydrogenated carbon atoms to a prevalence of microcrystalline graphitic domains. The depth profile of hydrogen in the grown film for 120 min has been measured by the 1H(15N, αγ)12C nuclear reaction analysis technique. The low value of the hydrogen content (less than 4 at.%) is consistent with the structure of this carbon film which has a density of 1.9 g cm-3. By the combined use of Rutherford backscattering spectrometry and nuclear reaction analysis the mean carbon coverage thickness was found to be 22±5 nm. Secondary ion mass spectrometry measurements confirmed this conclusion. |
| Databáze: | OpenAIRE |
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