Materials interactions in the integration of PZT ferroelectric capacitors
| Autor: | Robert E. Jones, J. R. Williams, R. Moazzami, A. C. Campbell, M. Kottke, Papu D. Maniar, Rich Gregory, J. L. Dupuie, M. L. Bozack, J. M. Ferrero |
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| Rok vydání: | 1995 |
| Předmět: |
Materials science
business.industry Integrated circuit Dielectric Condensed Matter Physics Ferroelectricity Ferroelectric capacitor Electronic Optical and Magnetic Materials law.invention Capacitor CMOS Control and Systems Engineering law Electrode Materials Chemistry Ceramics and Composites Optoelectronics Electrical and Electronic Engineering Crystallization business |
| Zdroj: | Integrated Ferroelectrics. 6:81-92 |
| ISSN: | 1607-8489 1058-4587 |
| DOI: | 10.1080/10584589508019355 |
| Popis: | Investigations of materials interactions that complicate the integration of PZT ferroelectric capacitors into CMOS technologies are discussed. These include interactions within the Pt/Ti electrodes structure, the reactions of sol-gel deposited PZT during crystallization with various underlying dielectrics (SiO2, Si3N4, Al2O3, and TiO2), and the impact of other integrated circuit processes on fabricated capacitors. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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