| Autor: |
K.M. van Delft, Wouter Olthuis, B.H. Timmer, R.P. Otjes, J. G. Borner, Piet Bergveld, A. van den Berg |
| Rok vydání: |
2001 |
| Předmět: |
|
| Zdroj: |
Micro Total Analysis Systems 2001 ISBN: 9789401038935 |
| Popis: |
A thin micromachined alternative for commercially available hydrophobic microporous membranes used in diffusion gas samplers has been realized. The thin membrane is made of Si3N4 and is etched porous. Underneath the membrane a channel is created. The membrane is rendered hydrophobic with a fluorocarbon coating. Bubble point and contact angle measurements have been performed on the membrane. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
