Structural investigation of thin film PLZT using X-ray absorption spectroscopy
Autor: | F.W. Lytle, A.Y. Wu, R.B. Greegor |
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Rok vydání: | 2003 |
Předmět: | |
Zdroj: | ISAF '92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics. |
DOI: | 10.1109/isaf.1992.300598 |
Popis: | The structural properties of RF magnetron-sputter-deposited lead lanthanum zirconate titanate (PLZT) were investigated using X-ray absorption near edge spectroscopy (XANES). Four samples were selected for XANES analysis: (1) a highly oriented PLZT 28/0/100 film ( approximately 4500 AA) deposited on Al/sub 2/O/sub 3/, (2) a highly oriented PLZT 28/0/100 film ( approximately 4500 AA) deposited in SiO/sub 2/ (2 mu m) over Si |
Databáze: | OpenAIRE |
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