Modeling of plume dynamics in laser ablation processes for thin film deposition of materials

Autor:	J. N. Leboeuf, J. M. Donato, David B. Geohegan, Kuan-Ren Chen, R. F. Wood, C. L. Liu, Alexander A. Puretzky
Rok vydání:	1996
Předmět:	Physics Surface coating Laser ablation Scattering Physical vapor deposition Fluid dynamics Plasma Thin film Condensed Matter Physics Molecular physics humanities Plume
Zdroj:	Physics of Plasmas. 3:2203-2209
ISSN:	1089-7674 1070-664X
DOI:	10.1063/1.871676
Popis:	The transport dynamics of laser-ablated neutral/plasma plumes are of significant interest for film growth by pulsed-laser deposition of materials since the magnitude and kinetic energy of the species arriving at the deposition substrate are key processing parameters. Dynamical calculations of plume propagation in vacuum and in background gas have been performed using particle-in-cell hydrodynamics, continuum gas dynamics, and scattering models. Results from these calculations are presented and compared with experimental observations.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5f727cf8b4c5295b59bb455a28bcf48c https://doi.org/10.1063/1.871676 Zobrazit plný text záznamu