Suppression of Cluster Ion Interferences in Glow Discharge Mass Spectrometry by Sampling High-Energy Ions from a Reversed Hollow Cathode Ion Source

Autor: Peter Williams, Ray Chern Deng
Rok vydání: 1994
Předmět:
Zdroj: Analytical Chemistry. 66:1890-1896
ISSN: 1520-6882
0003-2700
DOI: 10.1021/ac00083a019
Popis: The energy distributions of the ions produced in a reversed hollow cathode glow discharge ion source were studied using a Cameca IMS 3f mass spectrometer. Aluminum cathodes containing various impurities at concentrations of a few hundred parts per million (ppm) were used. Two prominent peaks were found in the energy distributions, corresponding to ions with high kinetic energies (formed in the negative glow region of the discharge) and ions with low kinetic energies (formed near the cathode potential at or near the extraction aperture in the base of the follow cathode). For Al + ions, the high-energy peak is more intense than the low-energy peak, while for Ar + ions the high-energy peak is much weaker than the low-energy peak due to efficient resonant charge exchange in the cathode dark space
Databáze: OpenAIRE