Neutron reflectivity investigation of the effects of harsh environments on Ta2N thin films
| Autor: | T. P. Rieker, Neville R. Moody, G. S. Smith, Jaroslaw Majewski, Paul Hubbard |
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| Rok vydání: | 1999 |
| Předmět: |
Hydrogen
Metals and Alloys Tantalum chemistry.chemical_element Mineralogy Surfaces and Interfaces Neutron scattering Surfaces Coatings and Films Electronic Optical and Magnetic Materials Cracking chemistry Materials Chemistry Neutron Composite material Thin film Chemical composition Layer (electronics) |
| Zdroj: | Thin Solid Films. 346:116-119 |
| ISSN: | 0040-6090 |
| Popis: | We use neutron reflectivity to study the effects of harsh environments on the composition and structure of Ta2N films. We investigated samples with a 700 A Ta2N layer, annealed in vacuum, hydrogen, and air, in an attempt to simulate the effects of aging on Ta2N thin films. We obtained good model/data fits for all samples studied, with the exception of the air annealed sample — inhomogeneities and cracking reduced the quality of this fit. A 90 A thick layer of TaHx was found on top of the hydrogen annealed sample, with no evidence of hydrogen enrichment at the Ta2N/SiO2 interface, Furthermore, we found that air annealing produces a ~2000 A thick layer of tantalum oxide. |
| Databáze: | OpenAIRE |
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