| Autor: |
Bastien Rachet, Etienne Shaffer, Shenqi Xie, Davor Kosanic, Diego Joss, Loïc Jacot-Descombes, Jürgen Brugger |
| Rok vydání: |
2015 |
| Předmět: |
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| Zdroj: |
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: |
10.1109/memsys.2015.7051035 |
| Popis: |
This paper reports on the design, fabrication and characterization of a novel micro-optical system for imaging that is based on a miniaturized reflective objective. The fabrication process innovatively combines two additive micro-fabrication techniques: inkjet printing, to create the smooth spherical mirror shape, and stencil lithography, for local metal deposition. The process is highly flexible and thus allows the fabrication of reflective micro-objectives of different optical properties, which can be tailored for targeted applications. The fabricated micro-objectives presented here are designed for endoscopic microscopy and exhibit a spot size of 1 micrometer, which represents a two-fold improvement over commercial spherical microlenses of comparable size. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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