Direct-writing lithography using laser diode beam focused with single elliptical microlens
| Autor: | Jonathan Trisno, Md. Nazmul Hasan, Muttahid-Ull Haque, Yung-Chun Lee |
|---|---|
| Rok vydání: | 2015 |
| Předmět: |
Microlens
Materials science Laser diode business.industry Mechanical Engineering Photoresist Condensed Matter Physics Laser Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention Semiconductor laser theory Optics law Optoelectronics Laser beam quality Electrical and Electronic Engineering Photolithography business Lithography |
| Zdroj: | Journal of Micro/Nanolithography, MEMS, and MOEMS. 14:043505 |
| ISSN: | 1932-5150 |
| DOI: | 10.1117/1.jmm.14.4.043505 |
| Popis: | A lithography method is proposed for arbitrary patterning using an elliptically diverging laser diode beam focused with a single planoconvex elliptical microlens. Simulations are performed to model the propagation properties of the laser beam and to design the elliptical microlens, which has two different profiles in the x- and y-axis directions. The microlens is fabricated using an excimer laser dragging method and is then attached to the laser diode using double-sided optically cleared adhesive (OCA) tape. Notably, the use of OCA tape removes the need for a complicated alignment procedure and thus significantly reduces the assembly cost. The minimum focused spot of the laser diode beam is investigated by performing single-shot exposure tests on a photoresist (PR) layer. Finally, the practical feasibility of this lithography technique to generate an arbitrary pattern is demonstrated by dotted and continuous features through thin chromium layer deposition on PR and a metal lift-off process. The results show that the minimum feature size for the dotted patterns is around 6.23 μm, while the minimum linewidths for continuous patterns is 6.44 μm. In other words, the proposed focusing technique has significant potential for writing any arbitrary high-resolution pattern for applications like printed circuit board fabrication. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|