Thermostable ferroelectric capacitors based on graded films of barium strontium titanate
| Autor: | A. A. Odinets, Andrey Tumarkin, M. V. Zlygostov, V. A. Volpyas, E. N. Sapego, Alexander Gagarin, S. V. Razumov |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Phase transition Materials science Physics and Astronomy (miscellaneous) Diffusion 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Ferroelectricity law.invention Capacitor law Sputtering 0103 physical sciences Deposition (phase transition) Gradation Composite material 0210 nano-technology Layer (electronics) |
| Zdroj: | Technical Physics. 62:1592-1598 |
| ISSN: | 1090-6525 1063-7842 |
| DOI: | 10.1134/s1063784217100231 |
| Popis: | The influence of the pressure of working gas during the ion–plasma sputtering on properties of deposited ferroelectric barium strontium titanate coatings has been experimentally studied. Variations in the of pressure of the working gas during deposition allows the component composition of the deposited layer to be changed, which leads to the diffusion of the phase transition and the improvement of temperature stability of properties of ferroelectric film. The gradation of layers has an impact on the temperature of the dielectric permittivity maximum, the shape of the dependence of the capacity on temperature, and the capacitance–voltage characteristics of the capacitor structures. |
| Databáze: | OpenAIRE |
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