A simple model of an asymmetric capacitive plasma with dual frequency

Autor: F A Haas
Rok vydání: 2004
Předmět:
Zdroj: Journal of Physics D: Applied Physics. 37:3117-3120
ISSN: 1361-6463
0022-3727
DOI: 10.1088/0022-3727/37/22/009
Popis: Recently, simulations have been carried out to investigate a dual frequency capacitive plasma in a system consisting of a pair of coaxial cylindrical electrodes. Considering the same asymmetric configuration, it is shown here that a sharp plasma?boundary model may be used to capture the essential dynamical features of the simulations.
Databáze: OpenAIRE