| Autor: |
W. Werner, S. Döring, L. Bartholomäus, S. Eckl, R. Rosenkranz |
| Rok vydání: |
2006 |
| Předmět: |
|
| Zdroj: |
International Symposium for Testing and Failure Analysis. |
| ISSN: |
0890-1740 |
| DOI: |
10.31399/asm.cp.istfa2006p0316 |
| Popis: |
The common Passive Voltage Contrast (VC) localization method has its limits in the case of substrate contact chains. Because of leakage currents it is not possible to charge up the open part of the chain. In two case studies it is shown, how the Active Voltage Contrast (AVC) method in FIB and SEM can help to localize faults in such structures. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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