Study of the optical properties of In0.52(AlxGa1−x)0.48As by variable angle spectroscopic ellipsometry

Autor:	K.‐J. Ling, J.‐C. Lee, Jen-Wei Pan, J.‐I. Chyi, Jia Lin Shieh, J.-H. Gau
Rok vydání:	1995
Předmět:	Wavelength Materials science Wavelength range Ellipsometry Analytical chemistry General Physics and Astronomy Spectroscopic ellipsometry Variable angle Dielectric function Refractive index Spectral line
Zdroj:	Journal of Applied Physics. 78:442-445
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.360624
Popis:	The optical properties of In0.52(AlxGa1−x)0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310–1700 nm. The refractive indexes were determined and could be given as n(x)=0.12x2–0.51x+3.6 at the wavelength of 1.55 μm. The measured thickness of the epilayers agrees within 5.2% of the nominal thickness. The energies and broadening parameters of the E1 and E1+Δ1 transitions as a function of Al composition were also examined based on the second‐derivative spectra of the dielectric function. The comparison between the results and the reported data is presented.
Databáze:	OpenAIRE
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