A Simple Technique for Submicron Scale Patterning of Silver Using Visible Light Interference

Autor: Robinson Anandakathir, Aloke Jain, Jayant Kumar, Jagdeep Singh, Abhishek Kumar, Ramaswamy Nagarajan, Ke Yang, Subhalakshmi Nagarajan
Rok vydání: 2008
Předmět:
Zdroj: Journal of Macromolecular Science, Part A. 45:963-966
ISSN: 1520-5738
1060-1325
DOI: 10.1080/10601320802380273
Popis: A novel, one step and simple methodology for the fabrication of submicron scale silver patterns is demonstrated. The photosensitivity of an organic silver salt has been utilized for this purpose of fabrication. The silver-organometallic compound is converted to metallic silver selectively in the illuminated regions. Surface morphology was studied by scanning electron microscopy (SEM). Energy dispersion spectroscopy (EDS) shows the presence of silver in the developed film. X-ray photoelectron spectroscopy (XPS) confirms the formation of metallic silver. Feature sizes of the order of 200 nm have been achieved using this technique.
Databáze: OpenAIRE