Long throw and i-PVD liners for W-plug contact and via applications

Autor:	S. R. Burgess, D.C. Butler, N. Urbansky, S. Schmidbauer, K. Buchanan
Rok vydání:	2002
Předmět:	High energy Materials science chemistry.chemical_element Tungsten Sputter deposition law.invention Electrical resistance and conductance chemistry law Electronic engineering Composite material Tin Spark plug Titanium
Zdroj:	2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160).
DOI:	10.1109/asmc.2001.925625
Popis:	Results are presented for long throw and ionized PVD layers for W-plug liner applications. 245 mm and 430 mm long throw modules are discussed, the latter being shown to be applicable to sub-0.17 /spl mu/m contacts when combined with very low process pressures. Data is presented showing that stable contacts can be produced without the damage risks associated with high energy ionized PVD processes. For metal applications above contact, a novel PVD module is shown to have particular benefits at via level. Chain data is presented showing >15% reduction in via resistance compared to any combination of i-PVD/long throw Ti/TiN sequences.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5e0bd1f7df081bc395c5bc76ea4c11fc https://doi.org/10.1109/asmc.2001.925625 Zobrazit plný text záznamu