Thin film coatings for improved IR detector performance

Autor:	Hue Thi-Bach Nguyen, J. Earl Rudisill
Rok vydání:	1992
Předmět:	Materials science Silicon Physics::Instrumentation and Detectors business.industry Detector chemistry.chemical_element Spectral bands engineering.material law.invention Optical coating Anti-reflective coating Optics chemistry Coating Impurity law engineering Optoelectronics Thin film business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
Popis:	Gain enhancement from IR detectors could be realized if they were antireflection (AR) coated. The feasibility of AR coating silicon surfaces over the 6 to 11 micron and 11 to 17 micron bands has been demonstrated using single and double-layer coatings. The band averaged reflectance values were reduced from about 30% to about 4% with double-layer coatings. The actual spectral reflectance curves agreed very closely to the computer-modelled performances. Temperature and material-pair parameters were established that resulted in thermally durable combinations. The coated silicon was successfully cycled between room temperature and 77 degrees Kelvin. Application of this coating to Si:As Impurity Band Conduction detectors was successfully demonstrated in the 6 to 11 micron spectral band.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5dc4b95e3cba1c7a4245b97785407a56 https://doi.org/10.1117/12.58693 Zobrazit plný text záznamu