Experimental realization of a well-controlled 3D silicon spiral photonic crystal
| Autor: | D.-X. Ye, Zu-Po Yang, Allan S. P. Chang, Toh-Ming Lu, J. Bur, Shawn-Yu Lin, R. Z. Wang, S. John |
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| Rok vydání: | 2007 |
| Předmět: |
Acoustics and Ultrasonics
Silicon business.industry Physics::Optics chemistry.chemical_element Substrate (electronics) Swing Condensed Matter Physics Rotation Symmetry (physics) Surfaces Coatings and Films Electronic Optical and Magnetic Materials Wavelength Optics chemistry business Astrophysics::Galaxy Astrophysics Spiral Photonic crystal |
| Zdroj: | Journal of Physics D: Applied Physics. 40:2624-2628 |
| ISSN: | 1361-6463 0022-3727 |
| DOI: | 10.1088/0022-3727/40/9/s02 |
| Popis: | Three-dimensional (3D) Si spiral photonic crystals have been realized by oblique angle deposition with a new approach of substrate 'swing' rotation. We demonstrate that, by using swing rotation, the arms of the spirals can be grown with a uniform diameter. Without swing rotation the arms of the spirals may overgrow due to a ballistic 'fan-out' phenomenon. The fabricated 3D Si spiral photonic crystals have a [0 0 1]-diamond symmetry which has been shown previously to have a large photonic band gap. Our optical measurements of reflectance have suggested the existence of such a photonic band gap in our structures centred at a wavelength of 2 µm. |
| Databáze: | OpenAIRE |
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