Direct bonding: From an optical technology to a broad research topic

Autor:	J.A. Pals, A.A. van Gorkum, Udo Klaus Paul Biermann
Rok vydání:	1995
Předmět:	Engineering Engineering management Research groups Incentive business.industry Semiconductor technology Optical engineering General Engineering Mechanical engineering Direct bonding business Diversity (business) Impression
Zdroj:	Philips Journal of Research. 49:1-10
ISSN:	0165-5817
Popis:	For more than thirty years Philips Research has been engaged in direct bonding. A survey is given of how what was first the study of an optical technology gradually changed into the development of special applications in semiconductor technology. Cooperation between workshops with mastered dedicated technologies and research groups with incentives is shown to be indispensable for success. The principles and diversity of direct bonding are briefly described, after which an impression is given of its stimulating impact on Philips' research programme.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5d873336bd76ae2a2c9cfbcf737e90a6 https://doi.org/10.1016/0165-5817(95)82000-0 Zobrazit plný text záznamu Full Text from ScienceDirect