Strain distribution in Mg x Zn 1-x O layers with various content of Mg grown on a -plane sapphire by plasma-assisted molecular beam epitaxy

Autor: A. Wierzbicka, J. Dyczewski, M.A. Pietrzyk, Adrian Kozanecki, J.M. Sajkowski, Anna Reszka
Rok vydání: 2017
Předmět:
Zdroj: Applied Surface Science. 404:28-33
ISSN: 0169-4332
Popis: Dependence of strain distribution on Mg concentration in MgxZn1-xO layers on a-plane sapphire substrate grown by plasma-assisted molecular beam epitaxy was examined. Accurate determination of lattice parameters was performed using high resolution X-ray diffraction technique. Concentration of Mg was established by Rutherford backscattering spectrometry. These results show the non-linear relationship between the lattice parameters and Mg concentration. We observe the gradual gain of strain with the increase of Mg content in MgxZn1-xO layers, in particular in c-direction. Besides epitaxial layers on a-plane sapphire are biaxially strained similar to layers on c-plane sapphire.
Databáze: OpenAIRE