Special aspects of structure formation of a multicomponent layer in vacuum-arc plasma

Autor:	Yu. A. Bystrov, A. A. Lisenkov, N. Z. Vetrov
Rok vydání:	2013
Předmět:	Zirconium Materials science Physics and Astronomy (miscellaneous) chemistry.chemical_element Vacuum arc Substrate (electronics) Sputter deposition engineering.material Carbide Zirconium carbide chemistry.chemical_compound chemistry Coating Chemical engineering engineering Layer (electronics)
Zdroj:	Technical Physics Letters. 39:914-916
ISSN:	1090-6533 1063-7850
DOI:	10.1134/s1063785013100155
Popis:	A phase boundary is an energy barrier to diffusing atoms. To decrease the diffusion rate, densely packed multicomponent structures were used. The correlation between the methods of obtaining and properties of multicomponent coating formed in a single fabrication cycle upon step-by-step synthesis of carbide of a substrate material and sputter deposition of layers of zirconium and zirconium carbide was investigated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5d65e17afe2ff8ef4412789074f171a9 https://doi.org/10.1134/s1063785013100155 Zobrazit plný text záznamu Plný text ve formátu PDF