Software tools for studying optical manufacturability with modern monochromatic monitoring devices

Autor: Alfons Zöller, Boris Romanov, Jennifer D. T. Kruschwitz, Michael K. Trubetskov, Michael Boos, Harro Hagedorn, Alexander V. Tikhonravov
Rok vydání: 2007
Předmět:
Zdroj: Optifab 2007: Technical Digest.
DOI: 10.1117/12.718119
Popis: The success of fabrication of optical coatings depends on a proper choice of a theoretical coating design and on the choice of monitoring strategy that provides low thickness errors for the chosen design. Software tools described in this presentation help an optical coating engineer to investigate a potential manufacturability of a given theoretical design when various monochromatic monitoring strategies are applied. This may help to reduce or even eliminate test deposition runs required for a successful coating fabrication.
Databáze: OpenAIRE