Autor:	S.H. Bae, D.C. Kwon, N.S. Yoon
Rok vydání:	2008
Předmět:	Materials science Materials Science (miscellaneous) Inductively coupled plasma atomic emission spectroscopy Analytical chemistry High density Electrical and Electronic Engineering Physical and Theoretical Chemistry Inductively coupled plasma Condensed Matter Physics
Zdroj:	Journal of the Korean Vacuum Society. 17:426-434
ISSN:	1225-8822
DOI:	10.5757/jkvs.2008.17.5.426
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5d483b42a1b23230a4fd5fe96b1d1975 https://doi.org/10.5757/jkvs.2008.17.5.426 Zobrazit plný text záznamu