Sensitivity enhancement by surface texturing of Ag-doped BaTiO3-CuO thin film for CO2 gas sensor

Autor:	S. B. Rudraswamy, Navakanta Bhat
Rok vydání:	2014
Předmět:	Materials science Nanostructure business.industry Doping Oxide Nanotechnology Surface finish chemistry.chemical_compound chemistry Sputtering Nano Optoelectronics Mixed oxide Thin film business
Zdroj:	2014 Conference on Optoelectronic and Microelectronic Materials & Devices.
DOI:	10.1109/commad.2014.7038644
Popis:	Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO 3 -CuO on Ag-doped BaTiO 3 -CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO 2 gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si substrate by RF Sputtering. Micro pillars of length 150 nm, 5um diameter and nano pillars of length 150 nm, 200 nm diameter of Ag-doped BaTiO 3 -CuO mixed oxide are fabricated on top of the film using lithography process. Sensing characteristics for different CO 2 concentration are obtained for different operating temperatures. Surface textured sensor device shows enhanced sensitivity over thin film sensor.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5cda529726cefcfe23237bbd98619f86 https://doi.org/10.1109/commad.2014.7038644 Zobrazit plný text záznamu