Compression test system for a single submicrometer particle

Autor:	Shizuka Nakano, Jun Akedo, Hisato Ogiso, Mikiko Yoshida
Rok vydání:	2005
Předmět:	Materials science Fabrication Compressive strength engineering Polishing Diamond Particle Compression test Substrate (electronics) engineering.material Composite material Instrumentation Focused ion beam
Zdroj:	Review of Scientific Instruments. 76:093905
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.2038187
Popis:	A compression test system was developed for measuring the strength of a single particle with a cross-sectional dimension of less than 1μm. The test system used a small diamond plate that has a flat platen to compress the particle on a diamond substrate. To avoid compressing multiple particles and to avoid direct contact between the platen and the substrate, the flat area was comparable in size to the tested particle. Mechanical processes such as polishing, however, have difficulty in fabricating such a small area. Here, fabrication of a micrometer-sized flat area was achieved by using focused ion beam technology. The resulting compression test system successfully measured the strength of a single submicrometer particle. Results showed that the mean strength of alumina particle with nominal mean diameter of 0.7μm was 2.9GPa.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5cb498c429e8424b7141718a8bb56869 https://doi.org/10.1063/1.2038187 Zobrazit plný text záznamu