The Efficiency of in-situ Cleaning Methods for Minimizing Electron Beam Induced Contamination

Autor:	H Demers, Eric Lifshin, H Parvaneh
Rok vydání:	2009
Předmět:	In situ Materials science Cleaning methods business.industry Cathode ray Optoelectronics Contamination business Instrumentation
Zdroj:	Microscopy and Microanalysis. 15:818-819
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s143192760909758x
Popis:	Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5c65ae8f26037ac9e72c0f74b8f2076f https://doi.org/10.1017/s143192760909758x Zobrazit plný text záznamu