Role of recovery anneals for chemical solution deposition (CSD) based SrBi2Ta2O9 (SBT) thin films
| Autor: | Vikram Joshi, Volker Weinrich, Gary F. Derbenwick, Nicolas Nagel, Günther Schindler, Manfred Engelhardt, Christine Dehm, Carlos Mazure, Walter Hartner, Narayan Solayappan |
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| Rok vydání: | 1998 |
| Předmět: |
Diffraction
Materials science business.industry Bilayer chemistry.chemical_element Condensed Matter Physics Electronic Optical and Magnetic Materials law.invention Capacitor Hysteresis chemistry Control and Systems Engineering law Electrode Materials Chemistry Ceramics and Composites Optoelectronics Deposition (phase transition) Electrical and Electronic Engineering Thin film business Platinum |
| Zdroj: | Integrated Ferroelectrics. 22:23-33 |
| ISSN: | 1607-8489 1058-4587 |
| DOI: | 10.1080/10584589808208026 |
| Popis: | Using a recovery anneal after deposition of the Pt top electrode and patterning the Platinum / SrBi2Ta2O9 bilayer has been established to obtain well shaped hysteresis curves with low leakage currents. Electrical properties of SBT test capacitors in dependence of temperature and time for the recovery anneal are discussed. Evidence for degradation of the electrical properties of SBT capacitors after patterning due to the appearance of a new unknown peak in X-ray diffraction (XRD) is presented. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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