Wall Temperature Dependence of Boronization Using Decaborane and Diborane

Autor:	Takeshi Ejima, M. Yamage, Masahiro Saidoh, Hideo Sugai, Norio Ogiwara
Rok vydání:	1993
Předmět:	Glow discharge Hydrogen Inorganic chemistry General Engineering General Physics and Astronomy chemistry.chemical_element Boranes Borane chemistry.chemical_compound chemistry Decaborane Boron Pyrolysis Diborane
Zdroj:	Japanese Journal of Applied Physics. 32:3968
ISSN:	1347-4065 0021-4922
Popis:	A new boronization technique based on pyrolysis of boron hydrides on hot walls was investigated in a laboratory experiment. The deposition rate of boron films through pyrolysis of decaborane was high enough to apply the pyrolysis to actual fusion devices bakable to 300°C. The hydrogen concentration of boron films prepared by the pyrolysis or conventional plasma-assisted boronization at various temperatures was measured with 15N nuclear reaction and/or IR absorption methods. The hydrogen content markedly decreased with increasing wall temperature, where decaborane always gives higher H content than diborane. Oxygen gettering and hydrogen recycling in a boronized vessel were evaluated by pulsed glow discharge in O2/He and D2, respectively. The results were compared between the pyrolysis and the plasma-based boronizations in decaborane or diborane at various wall temperatures.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5bef9a020d91162b00be2d69758f8bed https://doi.org/10.1143/jjap.32.3968 Zobrazit plný text záznamu