Local characterizations of quaternary AlInGaN/GaN heterostructures using TEM and HAADF-STEM
| Autor: | Masaki Takeguchi, Kazuo Furuya, Yoshihiro Irokawa, Kazutaka Mitsuishi, Hanako Okuno, Yoshiki Sakuma |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
Materials science
Analytical chemistry Heterojunction Surfaces and Interfaces General Chemistry Nitride Condensed Matter Physics Surfaces Coatings and Films Characterization (materials science) law.invention Lattice constant law Transmission electron microscopy Scanning transmission electron microscopy Materials Chemistry Energy filtered transmission electron microscopy Electron microscope |
| Zdroj: | Surface and Interface Analysis. 40:1660-1663 |
| ISSN: | 1096-9918 0142-2421 |
| Popis: | Local characterizations of a quaternary group III nitride material AlInGaN were carried out using electron microscopy. The chemical composition and the lattice parameter of the sample were estimated by a combination of energy dispersive X-ray spectroscopy and scanning transmission electron microscopy analyses and high-resolution transmission electron microscopy imaging, respectively. These results correspond well with the nominal composition of bulk sample measured by SIMS with only a few percent of error, indicating the validity of these techniques for the local characterization on this kind of hetero-structural materials. Copyright © 2008 John Wiley & Sons, Ltd. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Plný text