Activation Treatment of Ion Implanted Dopants Using Hybrid Super RTA Equipment

Autor:	Akimasa Kinoshita, Junji Senzaki, Makoto Katou, Shinsuke Harada, Mitsuo Okamoto, Shin Ichi Nishizawa, Kenji Fukuda, Fukuyoshi Morigasa, Tomoyoshi Endou, Takuo Isii, Teruyuki Yashima
Rok vydání:	2006
DOI:	10.4028/0-87849-425-1.803
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5bb81a24212887cb4092c58abd272910 https://doi.org/10.4028/0-87849-425-1.803 Zobrazit plný text záznamu