A MEMS X-type plane micro-cantilever stiffness research
| Autor: | Hao Yongping, Fengli Liu, Xing Wang, Mahui Xu |
|---|---|
| Rok vydání: | 2014 |
| Předmět: |
Microelectromechanical systems
Cantilever Materials science business.industry Mechanical engineering Stiffness Structural engineering Finite element method Computer Science::Other Approximation error medicine medicine.symptom Elasticity (economics) Elasticity coefficient business Structural analysis |
| Zdroj: | Proceeding of the 11th World Congress on Intelligent Control and Automation. |
| DOI: | 10.1109/wcica.2014.7053270 |
| Popis: | The closed X-type micro-electromechanical systems (MEMS) cantilever was designed and the mechanical analysis model was established, the coefficient of elasticity of the cantilever was derived by using the card's second of energy method law and Hooke's law. The relative error in the ANSYS finite element simulation did not beyond the allowable range. The spring constant were researched by changing cantilever's various structural parameters in the linear range. The study results provide a theoretical basis for the design and optimization of other closed type of plane micro cantilever. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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