Accurate on-line depth calibration with a laser interferometer during SIMS profiling on the Cameca IMS WF instrument
| Autor: | A. Merkulov, M. Schuhmacher, O. Merkulova, E. de Chambost |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Materials science
business.industry Scattering General Physics and Astronomy Experimental data Surfaces and Interfaces General Chemistry Condensed Matter Physics Laser Surfaces Coatings and Films law.invention Interferometry Optics Impact crater law Statistical analysis business Computer Science::Databases |
| Zdroj: | Applied Surface Science. :954-958 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2004.03.186 |
| Popis: | The presence of shallow interfaces in the crater bottom surface can lead to the appearance of several reflected beams from different depths that can distort the calibration close to these interfaces. A multi-beam scattering model has been developed. The results of this simulation are compared with experimental data and allow interpretation of the laser interferometer data for multi-layer structures. Statistical analysis of data from different types of structures show that even with the presence of measurement artifacts, the laser interferometer can be used for improving the depth scale calibration accuracy. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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