Implementation of the IMEC-cleaning in advanced CMOS manufacturing

Autor:	Marc Meuris, Sophia Arnauts, Ingrid Cornelissen, K. Kenis, M. Lux, Stefan De Gendt, Paul W. Mertens, I. Teerlinck, R. Vos, L. Loewenstein, M.M. Heyns, Klaus Wolke
Rok vydání:	2023
Zdroj:	Particles on Surfaces: Detection, Adhesion and Removal, Volume 7 ISBN: 9780429070716
DOI:	10.1201/9780429070716-6
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5b64cfdee5b41575c6bbb02ae5d9b86b https://doi.org/10.1201/9780429070716-6 Zobrazit plný text záznamu