Improvement of Mobility on Ultra-thin Body SOI MOSFETs by Use of High Pressure Hydrogen Annealing
| Autor: | Kiju Im, Hyunsang Hwang, Yunik Son, Hokyong Park, Man Chang, M.S. Rahman |
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| Rok vydání: | 2005 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.2005.b-2-5 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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