Quantification of Composition of Epitaxial Si/SiGe by EELS

Autor:	Wayne Zhao, Bianzhu Fu, Michael Gribelyuk
Rok vydání:	2018
Předmět:	010302 applied physics Materials science 0103 physical sciences Analytical chemistry Composition (visual arts) 02 engineering and technology 021001 nanoscience & nanotechnology 0210 nano-technology Epitaxy 01 natural sciences Instrumentation
Zdroj:	Microscopy and Microanalysis. 24:472-473
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927618002854
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5b03f07833981196585681a4cb6edad7 https://doi.org/10.1017/s1431927618002854 Zobrazit plný text záznamu