Synergistic Effect of F− and Persulfate in Efficient Titanium Alloy Chemical Mechanical Polishing
| Autor: | Liang Jiang, Linmao Qian, Changbang Deng |
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| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | ECS Journal of Solid State Science and Technology. 10:114003 |
| ISSN: | 2162-8777 2162-8769 |
| Popis: | Titanium alloys require excellent surface quality to achieve superior performance in biomedicine. In this paper, chemical mechanical polishing (CMP) was employed to prepare a satisfactory TC4 alloy surface. F− and persulfate were used as critical additives to improve the CMP efficiency. In comparison with the basic slurry without F− and persulfate, the slurry containing only F−, and the slurry containing only persulfate, the slurries containing both F− and persulfate lead to a noticeable increase in the material removal rate (MRR), which is attributed to the synergistic effect of F− and persulfate. After adding 80 mM NaF and 100 mM (NH4)2S2O8 to the basic slurry, the MRR increases significantly from 11 nm min−1 to 203 nm min−1, and the surface roughness R a reaches 3.4 nm. Moreover, there is no processing damage in the substrate. For the synergistic effect, Ti in TC4 alloy is first oxidized to Ti3+ and Ti4+ oxides by persulfate, and then HF, F− and HF2 − attack the oxides to produce soluble complex compounds, promoting the corrosion and the resultant MRR. This study provides a feasible way to achieve the high-efficiency CMP of titanium alloys via the synergistic effect of complexing agent and oxidizer to enhance the corrosive wear. |
| Databáze: | OpenAIRE |
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