Micromachined hetero-core anti-scatter grid for a digital X-ray image sensor
| Autor: | Jong-Hyun Lee, Dae-Hun Jeong |
|---|---|
| Rok vydání: | 2012 |
| Předmět: |
Microelectromechanical systems
Materials science Silicon business.industry Metals and Alloys chemistry.chemical_element Condensed Matter Physics Anti-scatter grid Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Core (optical fiber) Surface micromachining Optics chemistry law Wafer Electrical and Electronic Engineering Photolithography Image sensor business Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 185:145-150 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2012.07.016 |
| Popis: | A micromachined hetero-core anti-scatter grid is proposed with the aim of realizing a large field-of-view (FOV) for a digital X-ray image sensor. A theoretical anti-scattering ability was designed by deriving the rocking curve of the anti-scatter grid. The hetero-pattern, comprised of a silicon line and an air space, formed on either side of every septum, acts as the core of a linear grid. Large width silicon cores, one of the cores in a hetero-core design, play the role of a skeletal structure in the electroplating process. A large FOV was thus achieved owing to the high flexural rigidity of the skeletal structure. The hetero-cores were fabricated using photolithography and crystalline wet etching of (1 1 0) silicon, and the nickel septa were electroplated. Although the estimated theoretical limitation of the FOV was more than 100 mm × 100 mm, the FOV demonstrated from the experimental results was only 40 mm × 40 mm due to the constraint of the wafer size. The rocking curves of the fabricated grids were experimentally measured and compared with the theoretical calculations. |
| Databáze: | OpenAIRE |
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