Chemical solution deposition (CSD) and characterization of the solid solution series Ba(1−x)Pbx(Ti, Mn)O3
Autor: | U. Hasenkox, O. Lohse, M. Hoffmann, Rainer Waser, Dierk Bolten |
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Rok vydání: | 1999 |
Předmět: | |
Zdroj: | Ferroelectrics. 225:117-123 |
ISSN: | 1563-5112 0015-0193 |
Popis: | In this contribution, Ba(1−x)Pbx(Ti, Mn)O3 (BPT) and its properties will be presented. BPT has been synthesized using CSD based on metal propionates. The films were deposited on platinum covered silicon wafers with a spin-on technique. To convert the amorphous films into the BPT ceramic an annealing at 750°C was performed. The BPT thin films were characterized with X-ray diffraction and SEM. A platinum electrode was sputtered on top of the BPT thin film to obtain capacitor structures. Hysteresis, C-V measurements and leakage current measurements were used to investigate the effect of Pb substitution on the electrical properties of the film. |
Databáze: | OpenAIRE |
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