Chemical solution deposition (CSD) and characterization of the solid solution series Ba(1−x)Pbx(Ti, Mn)O3

Autor: U. Hasenkox, O. Lohse, M. Hoffmann, Rainer Waser, Dierk Bolten
Rok vydání: 1999
Předmět:
Zdroj: Ferroelectrics. 225:117-123
ISSN: 1563-5112
0015-0193
Popis: In this contribution, Ba(1−x)Pbx(Ti, Mn)O3 (BPT) and its properties will be presented. BPT has been synthesized using CSD based on metal propionates. The films were deposited on platinum covered silicon wafers with a spin-on technique. To convert the amorphous films into the BPT ceramic an annealing at 750°C was performed. The BPT thin films were characterized with X-ray diffraction and SEM. A platinum electrode was sputtered on top of the BPT thin film to obtain capacitor structures. Hysteresis, C-V measurements and leakage current measurements were used to investigate the effect of Pb substitution on the electrical properties of the film.
Databáze: OpenAIRE