| Autor: |
Jicheol Bea, Xin Wu, Mitsumasa Koyanagi, Ai Nakamura, Tanaka Tanaka, K. W. Lee, Suresh Ramalingam, Takafumi Fukushima |
| Rok vydání: |
2016 |
| Předmět: |
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| Zdroj: |
3DIC |
| Popis: |
We propose nano-scale Cu direct bonding technology using ultra-high density Cu nano-pillar (CNP) with for high stacking yield exascale 2.5D/3D integration. We clarified the joining mechanism of nano-scale Cu direct bonding using CNP. Nano-scale Cu pillar easily bond with Cu electrode by re-crystallization of CNP due to the solid phase diffusion and by morphology change of CNP to minimize interfacial energy at relatively lower temperature and pressure compared to conventional micro-scale Cu direct bonding. We confirmed for the first time that 4.3 million electrodes per die are successfully connected in series with the joining yield of 100%. The joining resistance of CNP bundle with 80μm height is around 30 mΩ for each pair of 10μm electrode diameter. Normalized capacitance of CNP bundle with 80μm height is 0.2 fF per μm wire length. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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