Fabrication and characterization of ultra-high resolution multilayer-coated blazed gratings

Autor:	Dmitriy L. Voronov, Eric M. Gullikson, Farhad Salmassi, Erik H. Anderson, Scott Dhuey, Tony Warwick, Howard A. Padmore, Valeriy V. Yashchuk, Rossana Cambie
Rok vydání:	2011
Předmět:	Diffraction Physics Nuclear and High Energy Physics Fabrication business.industry Grating Diffraction efficiency law.invention Optics law Blazed grating business Instrumentation Diffraction grating Groove (engineering) Electron-beam lithography
Zdroj:	Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 649:156-159
ISSN:	0168-9002
DOI:	10.1016/j.nima.2010.11.064
Popis:	Multilayer coated blazed gratings with high groove density are the most promising candidate for ultra-high resolution soft x-ray spectroscopy. They combine the ability of blazed gratings to concentrate almost all diffraction energy in a desired high diffraction order with high reflectance soft x-ray multilayers. However in order to realize this potential, the grating fabrication process should provide a near perfect groove profile with an extremely smooth surface of the blazed facets. Here we report on successful fabrication and testing of ultra-dense saw-tooth substrates with 5,000 and 10,000 lines/mm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5a79ae9aa0c374e8f18f262dc3fdd9af https://doi.org/10.1016/j.nima.2010.11.064 Zobrazit plný text záznamu Full Text from ScienceDirect