Defect structure of 4H silicon carbide ingots

Autor: A. V. Bulatov, D. D. Avrov, A. Yu. Fadeev, Yu. M. Tairov, A.O. Lebedev, S.I. Dorozhkin
Rok vydání: 2011
Předmět:
Zdroj: Journal of Crystal Growth. 318:394-396
ISSN: 0022-0248
Popis: Defects caused by 15R polytype inclusions in 4H silicon carbide ingots have been considered. Growth rate along with curvature of the interface determines the stability of the 4H-polytype reproduction. The domain structure arising in the 4H polytype as a result of foreign polytype inclusion has been analyzed. Antiphase domains of the 4H polytype emerging at the top and lateral sides of 15R inclusion form a strictly determined set of binary and ternary joints (extended threading defects). Junctions of a higher order could generate open-core threading superdefects.
Databáze: OpenAIRE