Clean ultrahigh vacuum system with single‐structure diffusion pumps

Autor:	T. J. Gay, J. A. Brand, M. C. Fritts, J. E. Furst, M. A. Khakoo, E. R. Mell, M. T. Sieger, W. M. K. P. Wijayaratna
Rok vydání:	1994
Předmět:	Chemistry Vacuum engineering Nuclear engineering Ultra-high vacuum Analytical chemistry Foreline Surfaces and Interfaces Partial pressure Liquid nitrogen Diffusion (business) Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 12:2903-2910
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.578963
Popis:	A practical example of the use of single‐structure diffusion pumping groups in an experiment requiring hydrocarbon‐free, ultrahigh vacuum is presented. With the use of proper vacuum procedures and careful foreline design and operation, but with no exotic hardware or liquid nitrogen, we have demonstrated that such a pump could provide vacuum that was ‘‘clean,’’ i.e., which had no residual pump‐oil contamination to a partial pressure below 10−8 mbar. Their use is thus compatible, at least in peripheral vacuum chambers, with standard ‘‘UHV‐surface science’’ processes. We discuss our vacuum system in detail, and present a review of the literature on the production of clean vacua with diffusion pumps.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5a35a111d4fc1b4e8ee83fe21425de88 https://doi.org/10.1116/1.578963 Zobrazit plný text záznamu