A new lifetime prediction method for hot-carrier degradation in n-MOSFETs with ultrathin gate oxides under Vg=Vd

Autor: Xiaorong Duan, Fuchen Mu, Changhua Tan, Mingzhen Xu
Rok vydání: 2001
Předmět:
Zdroj: Microelectronics Reliability. 41:1909-1913
ISSN: 0026-2714
DOI: 10.1016/s0026-2714(01)00118-4
Popis: Hot-carrier degradation of n-MOSFETs at high gate voltages ( V g = V d ) is examined. A new lifetime prediction method is developed based on the universal power law between the degradation of saturated drain current (d I dsat ) and the product of the injected charge fluence times the gate current, which is independent of gate or drain voltages. This method is applied to 4 and 5 nm n-MOSFETs and lifetimes are estimated under their operation conditions. It is applicable to n-MOSFETs with ultrathin gate oxides.
Databáze: OpenAIRE