Instability mechanisms in amorphous silicon thin film transistors and the role of the defect pool

Autor: M. J. Powell, S. C. Deane, C. van Berkel
Rok vydání: 1991
Předmět:
Zdroj: Journal of Non-Crystalline Solids. :1215-1220
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(05)80342-4
Popis: The threshold voltage shift in amorphous silicon thin film transistors at moderate applied bias is detemined by changes in the density of dangling bond states in the a-Si:H. Positive bias-stress creates dangling bond states at a low energy (D e states), in both oxide and nitride transistors. Negative bias-stress creates dangling bond states at higher energy (D h states) in oxide transistors, but mainly reduces the density of D e states in nitride transistors. These results are explained using a defect pool model for the dangling bond states. The difference for oxide and nitride transistors is due to a different zero bias Fermi energy position at the interface. For nitride transistors, charge trapping at higher bias, followed by thermal annealing leads to a new zero bias thermal equilibrium density of states. Transistor characteristics can be optimised in this way.
Databáze: OpenAIRE