Nonlinear optical mapping of 3C-inclusions in 6H-SiC-epilayers
| Autor: | G. Lüpke, Heinrich Kurz, A. Gölz, C. Meyer, E. Stein von Kamienski |
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| Rok vydání: | 1997 |
| Předmět: |
Materials science
business.industry Mechanical Engineering Second-harmonic imaging microscopy Second-harmonic generation General Chemistry Radiation Electronic Optical and Magnetic Materials Optics Microcrystalline Nondestructive testing Materials Chemistry Wafer Electrical and Electronic Engineering Thin film business Order of magnitude |
| Zdroj: | Diamond and Related Materials. 6:1374-1377 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/s0925-9635(97)00097-6 |
| Popis: | Optical second-harmonic generation (SHG) is shown to be a powerful technique for identifying different polytypes of SiC-films deposited on 6H-SiC substrates. The rotational anisotropy of the SHG radiation reflected from homo-epitaxially grown 6H-SiC epilayers provides a clear fingerprint of microcrystalline inclusions of 3C-SiC. The large dynamic range of the SHG response of more than one order of magnitude between different SiC polytypes allows a fast nondestructive mapping of SiC wafer surfaces with a lateral resolution in the μm-regime. |
| Databáze: | OpenAIRE |
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