Precise optical constant determination in the soft x-ray, EUV, and VUV spectral range

Autor:	Najmeh Abbasirad, Qais Saadeh, Richard Ciesielski, Alexander Gottwald, Vicky Philipsen, Igor Makhotkin, Andrey Sokolov, Michael Kolbe, Frank Scholze, Victor Soltwisch
Rok vydání:	2023
Zdroj:	Metrology, Inspection, and Process Control XXXVII.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::59cad3d90fa91059975bec6b6b26d4b2 https://doi.org/10.1117/12.2659369 Zobrazit plný text záznamu