The properties of ion-implanted LiNbO3 waveguides measured by the RBS and ion beam etching stripping methods
| Autor: | Qing Huang, Xi-Feng Qin, Tao Liu, Lei Wang, Xue-Lin Wang, Jin-Hua Zhao, Gang Fu, Peng Liu, Sha-Sha Guo |
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| Rok vydání: | 2011 |
| Předmět: |
Materials science
Physics::Instrumentation and Detectors business.industry Organic Chemistry Physics::Optics Refractive index profile Stripping (fiber) Fluence Atomic and Molecular Physics and Optics Spectral line Electronic Optical and Magnetic Materials Ion law.invention Inorganic Chemistry Ion implantation Optics law Lattice (order) Optoelectronics Electrical and Electronic Engineering Physical and Theoretical Chemistry business Waveguide Spectroscopy |
| Zdroj: | Optical Materials. 33:1357-1361 |
| ISSN: | 0925-3467 |
| Popis: | Z-cut LiNbO3 crystals were implanted at room temperature with 3.0 MeV O ions with a fluence of 6 × 1014 ions/cm2. The effective refractive index of the guided mode was obtained by the prism coupling technique combined with mechanical stripping (ion beam etching) at room temperature. Surface layers, with thicknesses of 300, 630, 880, 1100, and 1500 nm, were removed. The channel spectra of LiNbO3 waveguides with different etching depths were measured by the RBS technique. The damage profile of the LiNbO3 waveguide was studied by dechannelling analysis with a multiple scattering function based on the channel spectrum. The refractive index profile was calculated based on the lattice damage ratio. The effective refractive index of the guided mode simulated by BPM showed good agreement with the experiment value. |
| Databáze: | OpenAIRE |
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